DuPont™ Kalrez® 8002

DuPont™ Kalrez® 8002 perfluoroelastomer parts are a clear product for ash/strip applications. This unfilled product offers excellent plasma-cracking resistance and ultra-low particle generation in oxygen and fluorine-based plasmas versus mineral-filled products. Kalrez® 8002 exhibits excellent resistance to dry process chemistry, has good mechanical strength and is well suited for static, low stress/low sealing force and “select” bonded door seal applications. A maximum application temperature of 275°C (527°F) is suggested. Ultrapure post cleaning and packaging is standard for all Kalrez® 8002 parts.

Typical Physical Properties

Performance Features/Benefits

• Ultra-low particle generation in oxygen and fluorine-based plasmas
• Excellent (low) compression set properties
• Excellent plasma-cracking resistance
• Excellent resistance to dry process chemistry

Suggested Applications

• Gas inlet seals
• Gas orifice seals
• Gas feedthrough seals
• “Select” bonded door seals
• Other static and low stress/low sealing force applications

Fabs Choose DuPont™ Kalrez® 8002 for Improved Performance
Kalrez® 8002 has been reported to significantly improve wafer production in a variety of semiconductor ash process applications where oxygen and fluorinated plasmas are used.

Case Report #7737 — Kalrez® 8002 Improved Wafer Production Over 5x versus Incumbent Perfluoroelastomer

• Process Type: Ash
• Process chemistry: O2, CF4
• Process Temperature: ~80C
• Cleaning chemistry: N/A
• Incumbent Performance: Perfluoroelastomer failed after 270 RF hours due to cracking and vacuum
leakage.

Case Report #4536 — Kalrez® 8002 Improved Wafer Production Over 50% versus Incumbent Perfluoroelastomer

• Process Type: Ash top/bottom plasma tube seals
• Process chemistry: O2, CF4
• Process Temperature: 80-150C
• Cleaning chemistry: N/A
• Incumbent Performance: Perfluoroelastomer failed due to erosion and excessive particle generation
after 6 months

Warranty for Kalrez products

• Only applies to Dupont products distributed genuine in Vietnam.

• All Kalrez products are warranted if the machine fails due to manufacturer fault.

• For warranty and product maintenance, please contact Achilles, customer service phone number: 098 469 4884(Ms.Duc)

• Achilles is the genuine supplier of products related to Kalrez DuPont.

• For retail/whole sale pricing, bulk ordering and product information advice please contact  098 469 4884 (Ms Duc) via info@achilles.com.vn or the website https://achilles.com/