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For Semiconductor Dielectric Etch Applications
Product Description
DuPont™ Kalrez® 9300 perfluoroelastomer parts are a brown product for Dielectric (Oxide) Etch applications. It has been specifically designed for use in applications where the plasma environment is a combination of ions (“physical”) and radicals (“chemical”), i.e., where a balance of “physical” and “chemical” plasma erosion resistance is typically required.
DuPont™ Kalrez® 9300 perfluoroelastomer parts are a brown product for Dielectric (Oxide) Etch applications. It has been specifically designed for use in applications where the plasma environment is a combination of ions (“physical”) and radicals (“chemical”), i.e., where a balance of “physical” and “chemical” plasma erosion resistance is typically required.
Typical Physical Properties
| Color |
Brown |
| Hardness, Shore A (plied slabs) (test method ASTM D2240) |
77 |
| Hardness, Shore M (O-ring) (test method ASTM D2240 & D1414) |
82 |
| 100% Modulus, MPa (psi) (test method ASTM D412) |
6.13 (889) |
| Tensile Strength at Break, MPa (psi) (test method ASTM D412) |
15.43 (2238) |
| Elongation at Break (%) (test method ASTM D412) |
222 |
| Compression Set, %70 hrs.at 204°C (400°F) (test method ASTM D395B & ASTM D1414) |
25 |
| Compression Set, %70 hrs.at 250°C (482°F) (test method ASTM D395B & ASTM D1414) |
37 |
| Compression Set, %70 hrs.at 300°C (572°F) (test method ASTM D395B & ASTM D1414) |
56 |
| Maximum Service Temperature °C(°F) |
300 (572) |
Features/Benefits
• Low erosion rate and ultra-low particle generation in ion/radical dominant oxygen and fluorine-based plasmas
• Excellent resistance to etch process chemistry
• Very low metals content
• Excellent thermal stability
• Excellent mechanical strength
Suggested Applications
• Gas inlet/orifice seals
• Chamber lid seals
• Isolation valve seals
• Bonded gate valves/slit valve door seals
Plasma Weight Loss
Because there is no industry standard to characterize elastomer plasma resistance, OEMs and Fablines rely on in-use testing and actual performance. To further assist the industry in proper seal selection, DuPont has developed a test method that closely approximates chamber conditions to quantify seal resistance to plasma. In this test on weight loss, O-rings are placed on a silicon wafer and directly exposed to extremely damaging plasma environments. Kalrez® 9300 parts exhibited lower weight loss upon exposure to combined ion and radical oxygen and fluorine-based plasma versus Kalrez® 8085 parts and competitive FFKM A23.
Warranty for Kalrez products
• Only applies to Dupont products distributed genuine in Vietnam.
• All Kalrez products are warranted if the machine fails due to manufacturer fault.
• For warranty and product maintenance, please contact Achilles, customer service phone number:098 469 4884(Ms. Duc).
• Achilles is the genuine supplier of products related to Kalrez DuPont.
• For retail/whole sale pricing, bulk ordering and product information advice please contact 098 469 4884(Ms. Duc) via info@achilles.com.vn or the website https://achilles.com/.
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