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For Semiconductor Applications
Product Description
DuPont™ Kalrez® 4079 perfluoroelastomer parts are a black, low compression set product for use in many dry and wet semiconductor process environments. It has excellent chemical resistance, good mechanical properties and outstanding thermal stability. Kalrez® 4079 exhibits low weight loss in reactive plasmas and has good response to temperature cycling effects. It is not recommended for use in amines. A maximum continuous service temperature of 316 °C is suggested. Short excursions to higher temperatures are also possible. Ultrapure post-cleaning and packaging is optional.
Typical Physical Properties
| Hardness Shore A, (pellet) (test ASTM D2240) | 75
|
| Hardness Shore M, (O-ring) (test ASTM D2240 & D1414) |
83 |
| 100% Modulus,(MPa) (test ASTM D412) |
7.24 |
| Tensile Strength at Break, (MPa) (test ASTM D412) |
16.88 |
| Elongation at Break, (%) (test ASTM D412) |
150 |
| Compression Set, (%) 70 hr at 204 °C, )%) (test ASTM D395B) |
25 |
| Maximum Continuous Service Temperature, °C |
316 |
Performance Features/Benefits
• Excellent thermal stability
• Excellent chemical resistance
• Excellent compression set resistance
• Good response to temperature cycling effects
Typical O-ring Compression Set Performance (70 hr data)
|
Material Tested, % C/S at |
204 °C | 250 °C | 300 °C |
|
Kalrez 4079 |
37 | 41 | 45 |
|
Competitive |
43 | 100 |
Sample |
Kalrez® Offers Excellent Resistance to Chemical Attack
For many applications, low volume swell of elastomers is critical for proper equipment operation. Excessive swell may cause permanent seal failure due to equipment hang-up, extrusion, etc. While other physical property testing may be needed to adequately define product performance in a particular application, volume swell is an excellent indicator of resistance to chemical attack. A summary of the internal and external compatibility tests performed to determine the volume swell of Kalrez® 4079UP in various semiconductor wet process environments is provided in the table on the following page
Volume Swell, %
| Immersion Chemistry | Exposure Conditions | DuPont™ Kalrez® 4079UP |
| UPDI Water | 85 °C, 30 days |
2.3 |
| Piranha | 25 °C, 30 days |
0.1 |
| SC-1 | 25 °C, 30 days |
1.1 |
| SC-2 | 25 °C, 30 days |
0.1 |
| 49% HF | 25 °C, 30 days |
0.6 |
| Sulfuric Acid | 120 °C, 30 days |
0.8 |
| Nitric Acid | 85 °C, 7 days |
1.5 |
| n-Methylpyrrolidone | 85 °C, 7 days |
2.4 |
Warranty for Kalrez products
• Only applies to Dupont products distributed genuine in Vietnam.
• All Kalrez products are warranted if the machine fails due to manufacturer fault.
• For warranty and product maintenance, please contact Achilles, customer service phone number:098 469 4884(Ms. Duc).
• Achilles is the genuine supplier of products related to Kalrez DuPont.
• For retail/whole sale pricing, bulk ordering and product information advice please contact 098 469 4884 (Ms. Duc) via info@achilles.com.vn or the website https://achilles.com/.
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