DuPont™ Kalrez® 8002

DuPont™ Kalrez® 8002 perfluoroelastomer parts are a clear product for ash/strip applications. This unfilled product offers excellent plasma-cracking resistance and ultra-low particle generation in oxygen and fluorine-based plasmas versus mineral-filled products. Kalrez® 8002 exhibits excellent resistance to dry process chemistry, has good mechanical strength and is well suited for static, low stress/low sealing force and “select” bonded door seal applications. A maximum application temperature of 275°C (527°F) is suggested. Ultrapure post cleaning and packaging is standard for all Kalrez® 8002 parts.

Description

For Semiconductor Ash/Strip Applications

Product Description

DuPont™ Kalrez® 8002 perfluoroelastomer parts are a clear product for ash/strip applications. This unfilled product offers excellent plasma-cracking resistance and ultra-low particle generation in oxygen and fluorine-based plasmas versus mineral-filled products. Kalrez® 8002 exhibits excellent resistance to dry process chemistry, has good mechanical strength and is well suited for static, low stress/low sealing force and “select” bonded door seal applications. A maximum application temperature of 275°C (527°F) is suggested. Ultrapure post cleaning and packaging is standard for all Kalrez® 8002 parts.

Typical Physical Properties

Color

Clear

Hardness, Shore A (plied slabs) (test method JIS 6253)

69

Hardness, Shore M (O-ring) (test method ASTM D2240 & ASTM D1414)

76

100% Modulus, MPa (psi) (test method JIS 6251)

2.30 (334)

Tensile Strength at Break, MPa (psi) (test method JIS 6251)

23.10 (3350)

Elongation at Break (%) (test method JIS 6251)

256

Compression Set, %70 hrs.at 204 °C (400 °F) (test method ASTM D395B & ASTM D1414)

12

Maximum Service Temperature °C (°F)

275 (527)

Performance Features/Benefits

• Ultra-low particle generation in oxygen and fluorine-based plasmas.

• Excellent (low) compression set properties.

• Excellent plasma-cracking resistance.

• Excellent resistance to dry process chemistry.

Suggested Applications:

Gas inlet seals.

Gas orifice seals

Gas feedthrough seals

“Select” bonded door seals

Other static and low stress/low sealing force applications.

Fabs Choose DuPont™ Kalrez® 8002 for Improved Performance.

Kalrez® 8002 has been reported to significantly improve wafer production in a variety of semiconductor ash process applications where oxygen and fluorinated plasmas are used.

Case Report #7737 — Kalrez® 8002 Improved Wafer Production Over 5x versus Incumbent Perfluoroelastomer

• Process Type: Ash.

• Process chemistry: O2, CF4.

• Process Temperature: ~80C.

• Cleaning chemistry: N/A.

• Incumbent Performance: Perfluoroelastomer failed after 270 RF hours due to cracking and vacuum leakage.

Case Report #4536 — Kalrez® 8002 Improved Wafer Production Over 50% versus Incumbent Perfluoroelastomer

• Process Type: Ash top/bottom plasma tube seals.

• Process chemistry: O2, CF4.

• Process Temperature: 80-150C.

• Cleaning chemistry: N/A.

• Incumbent Performance: Perfluoroelastomer failed due to erosion and excessive particle generation after 6 months

Warranty for Kalrez products

• Only applies to Dupont products distributed genuine in Vietnam.

• All Kalrez products are warranted if the machine fails due to manufacturer fault.

• For warranty and product maintenance, please contact Achilles, customer service phone number: 098 213 2184 (Ms. Duc).

• Achilles is the genuine supplier of products related to Kalrez DuPont.

• For retail/whole sale pricing, bulk ordering and product information advice please contact 098 213 2184 (Ms. Duc) via info@achilles.com.vn or the website https://achilles.com/.

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