Tiếng Việt
The Visionpad Polishing Pads series for chemical mechanical planarization (CMP) is a platform designed for multiple applications and advanced nodes. Visionpad technology is engineered with unique polymer chemistry, including optimized pore size and porosity levels. This leads to a range of polishing performance options depending on process requirements.
Visionpad™ 3000 Series of Polishing Pads
The Visionpad™ 3000 series of polishing pads is designed to achieve the defect levels of the Politex™ pad with the pad planarization capabilities of the IC1000™ pad in Copper barrier processes. The Visionpad™ 3000 series has a softer surface than an IC1000™ pad to reduce defects, while maintaining a high stiffness to provide superior planarization.
Benefits:
- Improved defectivity compared to IC1000™
- Improved planarization compared to soft pads
Applications:
- Copper barrier
Visionpad™ 5000 Series of Polishing Pads
The Visionpad™ 5000 series is designed for use in Oxide and Tungsten applications. Visionpad™ 5000 series pads exhibit predictable pad-to-pad performance, offer stable operation throughout the process, and demonstrate a similar or increased pad life when compared to IC1000™ pads.
Benefits:
- Improved planarization compared to IC1000™
- Longer pad lifetime due to low cut rate
Uses:
- Tungsten, STI/Ceria, Oxide
Visionpad™ 6000 Series of Polishing Pads
The Visionpad™ 6000 series of polishing pads is designed to significantly improve defectivity and dishing performance as well as extend the pad lifetime compared to IC1000™.
Benefits:
- Step-out defectivity performance
- Long pad lifetime due to low cut rate
Applications:
- Copper bulk, STI/Ceria, Oxide
Visionpad™ 7000 Series of Polishing Pads
The Visionpad™ 7000 series of polishing pads is designed to significantly improve lifetime compared to IC1000™.
Benefits:
- Long pad lifetime due to low cut rate
Applications:
- Copper Bulk, STI/Ceria, Oxide, Tungsten
Visionpad™ 9000 Series of Polishing Pads
The Visionpad™ 9000 series of polishing pads is designed to reduce defectivity and dishing as well as extend the pad lifetime compared to IC1000™.
Benefits:
- Reduced defectivity performance
- Improved dishing performance
- Long pad lifetime due to low cut rate
Applications:
- Copper Bulk, STI/Ceria, Oxide
Warranty for CMP Pads product
• Only applies to Dupont products distributed genuine in Vietnam.
• All Visionpad Polishing Pads products are warranted if the machine fails due to manufacturer fault.
• For warranty and product maintenance, please contact Achilles, customer service phone number: 097 613 7653 (Ms.Mai)
• Achilles is the genuine supplier of products related to DuPont
• For retail/whole sale pricing, bulk ordering and product information advice please contact 097 613 7653 (Ms.Mai) via info@achilles.com.vn or the website https://achilles.com/.
Reviews
There are no reviews yet.